JPS6316127Y2 - - Google Patents

Info

Publication number
JPS6316127Y2
JPS6316127Y2 JP295582U JP295582U JPS6316127Y2 JP S6316127 Y2 JPS6316127 Y2 JP S6316127Y2 JP 295582 U JP295582 U JP 295582U JP 295582 U JP295582 U JP 295582U JP S6316127 Y2 JPS6316127 Y2 JP S6316127Y2
Authority
JP
Japan
Prior art keywords
pulley
guide member
pulleys
holding
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP295582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58106859U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP295582U priority Critical patent/JPS58106859U/ja
Publication of JPS58106859U publication Critical patent/JPS58106859U/ja
Application granted granted Critical
Publication of JPS6316127Y2 publication Critical patent/JPS6316127Y2/ja
Granted legal-status Critical Current

Links

JP295582U 1982-01-13 1982-01-13 電子顕微鏡用試料装置 Granted JPS58106859U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP295582U JPS58106859U (ja) 1982-01-13 1982-01-13 電子顕微鏡用試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP295582U JPS58106859U (ja) 1982-01-13 1982-01-13 電子顕微鏡用試料装置

Publications (2)

Publication Number Publication Date
JPS58106859U JPS58106859U (ja) 1983-07-20
JPS6316127Y2 true JPS6316127Y2 (en]) 1988-05-09

Family

ID=30015906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP295582U Granted JPS58106859U (ja) 1982-01-13 1982-01-13 電子顕微鏡用試料装置

Country Status (1)

Country Link
JP (1) JPS58106859U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7163588B2 (en) 1997-05-09 2007-01-16 Semitool, Inc. Processing a workpiece using water, a base, and ozone
US7416611B2 (en) 1997-05-09 2008-08-26 Semitool, Inc. Process and apparatus for treating a workpiece with gases

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7163588B2 (en) 1997-05-09 2007-01-16 Semitool, Inc. Processing a workpiece using water, a base, and ozone
US7416611B2 (en) 1997-05-09 2008-08-26 Semitool, Inc. Process and apparatus for treating a workpiece with gases

Also Published As

Publication number Publication date
JPS58106859U (ja) 1983-07-20

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